Description: 117 single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor / 117 single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor/(84) forming from vapor or gaseous state (e.g., vpe, sublimation) (88) with decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., cvd) (99) with a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes) (100) fully-sealed or vacuum-maintained chamber (e.g., ampoule)
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