Description: 117 single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor / 117 single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor/(84) forming from vapor or gaseous state (e.g., vpe, sublimation) (88) with decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., cvd) (104) using an organic precursor (e.g., propane, metal-organic, mocvd, movpe)
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